ASML EUV Lithography Shipments & Revenue
Annual shipments and revenue of EUV (Extreme Ultraviolet) lithography systems from ASML, the only company on Earth that makes them. Each machine costs $150M–$380M+ (the newer High-NA variant), and no advanced AI chip can be built without one.
EUV Systems Shipped (left axis)
EUV Revenue $B (right axis)
Updated at 2026-05-06
WFE Revenue + Order Book by Vendor (Quarterly)
Quarterly revenue of the Big 5 wafer-fab-equipment vendors (ASML, AMAT, LRCX, KLA, Tokyo Electron), who together hold ~85% of WFE spending.
Updated at 2026-05-28
WFE Revenue by Region + Customer Concentration (FY2024)
FY2024 wafer-fab-equipment revenue for the Big 5 vendors, split by customer region. China is the largest single-region exposure (~30-40%).
Updated at 2026-05-28