AI Chips

Semiconductor Equipment Market Share by Segment

Who sells the multi-million-dollar machines inside every chip fab. Lithography prints circuit patterns (ASML monopoly); etch and deposition carve and lay down material (Applied, Lam, Tokyo Electron); inspection checks for defects (KLA).

Lithography

$28B TAM
ASML
82%
Canon
10%
Nikon
8%

Etch Systems

$18.5B TAM
Lam Research
47%
Tokyo Electron
27%
Applied Materials
20%
Others
6%

Deposition (CVD/PVD)

$22B TAM
Applied Materials
40%
Lam Research
22%
Tokyo Electron
20%
ASM International
12%
Others
6%

Inspection & Metrology

$12B TAM
KLA
55%
Applied Materials
18%
Hitachi
12%
Others
15%

Market share by revenue segment, 2024. TAM = Total Addressable Market. Sources: VLSI Research, Gartner, company annual reports.

ASML EUV Lithography Shipments & Revenue

Annual shipments and revenue of EUV (Extreme Ultraviolet) lithography systems from ASML, the only company on Earth that makes them. Each machine costs $150M–$380M+ (the newer High-NA variant), and no advanced AI chip can be built without one.
EUV Systems Shipped (left axis)
EUV Revenue $B (right axis)

ASML EUV lithography system shipments and associated revenue. Each EUV system costs $150M–$380M+ (High-NA). ASML holds a 100% monopoly on EUV machines — every advanced AI chip requires them. 2025E = estimate. Sources: ASML annual reports, earnings calls.

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AI Chips - Equipment | Sterling